摘要
为了检测和表征陶瓷表面的缺陷设计了声表面波测试系统,以 LiNbO_3压电晶体制成的30MHz 叉指换能器用于激发和接收声表面波。在检测过程中,该 STS(表面至表面)换能器置于陶瓷样品之上;两者之间有液体介质作为耦合。以抛光面上含有～200μm 压痕裂纹的 Si_3N_4和 SiC 试样所进行的初步试验表明,该SAW 技术可用于无损评价。
An assembly of acoustic surface wave technique has been devised for detectingand characterizing surface defects in ceramics.The interdigital transducer with 30MHz made of LiNbO_3 piezoelectric crystal is used to excite acoustic surface wave.The STS (surface to surface) transducer is placed above the ceramic sample with aliquid medium between both of them during detecting.Preliminary experiments con-ducted on polished surfaces with indentation cracks of 200 μm in it of Si_3N_4 andSiC samples have indicated that the acoustic surface wave technique can be usedfor nondestructive evaluation,(NDE).
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1991年第3期366-369,共4页
Journal of Inorganic Materials
关键词
陶瓷
缺陷
声表面波
叉指换能器
Acoustic surface wave
Interdigital transducer
Ceramics
Defect
