摘要
提出了含预反馈的激光自混合干涉型位移测量结构 ,建立了系统模型 ,经理论分析和实验验证 ,结果表明 :该结构具有提高温度量程、提高测量信号信噪比及获得粗糙表面的锯齿干涉信号等特点。
A new self mixing interference structure including the pre feedback is proposed and its model is established. It is confirmed by computer simulating and experiment that the pre feedback one can extend the measuring range and increase the signal to noise ratio and obtain the sawtooth interference signal from a rough surface. \{
出处
《光学学报》
EI
CAS
CSCD
北大核心
2002年第3期308-312,共5页
Acta Optica Sinica
基金
国家自然科学基金 (6 0 1780 39)
河南省自然科学基金(0 1110 6 0 2 0 0 )资助课题
关键词
半导体激光
自混合干涉
预反馈
位移测量结构
semiconductor\} laser
self mixing interference
pre feedback
displacement measurement
