摘要
本文提出了测定结晶硅中六个杂质元素的光谱定量分析方法,阐述了整个分析方法的详细过程.分析结果的相对误差为±6.7及—13.3%;回收率为86～106%.
A method of quantitative spectroanalysis is showed for measureing six impure elements in crystaUinic sillicon. The details of analytic method are represented. The detection limit of this method reaches 0.15μg, Thw relative errors of analysis result are ±6.7. -13.3 and the recoverey ratioes are 87-106%.
出处
《山东科学》
CAS
1991年第1期50-54,共5页
Shandong Science
关键词
结晶硅
杂质元素
光谱定量分析
Spectrographic analysis, Element, Error, Reeoverey ratio.
