摘要
为拓展锰铜传感器的高压测试上限,本文采用薄膜技术研制了一种新型的锰铜传感器。该传感器采用氧化铝封装,后置式结构,两步薄膜工艺制作。利用二级轻气炮进行了40-107GPa的冲击高压加载,试验波形呈现出-理想的平台,寿命为1μs0标定蓝线Px(GPa)=6.0371+29.819(△R/R0)+21.591(△R/R0)2-6.8267(△R/R0)2近似于一条直线,精度达±3％。
To extend the measuring range to 100 GPa, a new type of manganin gauges is prepared by thin film technique. The gauges are designed as back-surface configuration,encapsulated in alumina matrix and fabricated by two-step thin film methods. Shock loadings in the 40-107 GPa range by a light gas gun resulted in flat-topped stress-time profiles with about 1 μs record history. The calibration curve Px(GPa)= 6.0371+ 29.819(△R/R0)+ 21.591(△R/R0)2 -6.8267(△R/R0)3 is almost a straight line with errors less than ±3%.
出处
《传感器世界》
2001年第9期7-10,共4页
Sensor World
关键词
锰铜传感器
薄膜
超高压力测试
Manganin gauge, Thinfilm, Ultrahigh pressure measurement
