摘要
MEMS技术将是 2 1世纪科技与产业的制高点之一 ,而微细加工技术又是MEMS发展的重要基础。微细加工技术在传统光刻工艺的基础上 ,又发展了灰调光刻、Lift Off、LIGA及准LIGA、激光和分子装配等适应三维结构的新技术。本文综述了目前国内外各种微细加工及其关键技术的研究状况 。
MEMS technology is a hot spot of science and industry in the 21st century, and micro fabrication technologies are the key problems of MEMS development. The new micro fabrication technologies for 3D structure are invented, which include gray tone lithography, Lift Off, LIGA, quasi LIGA, laser, molecule assembly technology, etc. In this paper, the state of the art on all sorts of micro fabrication and its key technologies in China and overseas is presented, and future prospects of development on MEMS are given.
出处
《电加工与模具》
2001年第5期1-6,共6页
Electromachining & Mould
