摘要
本文提出一种基于直接边界元方法的虚拟多介质 (Quasi MultipleMedium ,QMM)加速方法 ,并将它应用于三维VLSI多介质互连电容的计算中 .QMM方法将三维互连电容器中的单层介质看成由多个虚拟介质组成 ,从而大大减少了系数矩阵中的非零元数目 ,最终使计算时间和存储空间显著减少 .通过比较QMM算法与非QMM算法 ,以及商业软件Raphael对实际三维互连结构的计算 ,结果表明QMM算法在保持计算准确性的同时 ,可使电容提取的效率得到显著提高 .
A new Quasi-Multiple Medium (QMM) method is presented to accelerate computation of the direct boundary element method,and is applied to extraction of the 3-D interconnect capacitance with multiple dielectrics.Processing single dielectric as a combination of many quasi-multiple mediums,the QMM method produces much fewer non-zero entries in the coefficient matrix.As a result,the QMM method can greatly reduce the CPU time and save memory space used in the capacitance extraction.The QMM computation for several capacitors from actual layout is compared with that of non-QMM and Raphael,a famous commercial tool for parasitic capacitance extraction.The results of numerical experiments verify the analysis.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2001年第11期1526-1529,共4页
Acta Electronica Sinica
基金
国家重点基础研究基金 (G1 9980 30 4 1 1 )
国家自然科学基金(No .698760 2 4 )
关键词
互连电容提取法
集成电路
VLSI
虚拟多介质法
VLSI
parasitic capacitance
direct boundary element method
quasi-multiple medium
