摘要
利用PBII技术制备了TiN/DLC和TiN/Ag固体润滑膜 ,研究了膜层的成分结构及真空条件下的摩擦性能 .结果表明 :PBII有效地实现了表层润滑膜与基体之间成分和结构的过渡 ;真空条件下 ,接触面光滑(Ra <0 .1μm)的DLC与Ag之间的摩擦系数为 0 .0 9左右 ,DLC膜之间的摩擦系数也在 0 .0 9附近 ,且TiN/DLC润滑膜互为摩擦副的耐磨性能高于TiN/DLC和TiN/Ag润滑膜的配对 ;接触面较为粗糙 (Ra >0 .8μm) 的摩擦副分别配以TiN/DLC和TiN/Ag润滑膜 ,可获得良好的真空运转寿命 .
TiN/DLC and TiN/Ag solid lubricant films have been prepared by plasma based ion implantation. The investigation of composition and structure of lubricant films was performed by X ray photoelectron spectroscopy (XPS) and laser Raman spectroscopy. It was shown that a interlayer was formed by PBII, which carried out the mixing of composition and structure between surface lubricant films and substrate. The friction coefficient of DLC-DLC and DLC-Ag pair with smooth (R a <0.1 μm ) contact face, as measured in a ball on disk tribometer, were both about 0.09 in vacuum, whereas the coefficient of TiN-TiN pair was around 0.3. The wear resistance of DLC-DLC pair was far higher than that of TiN-TiN pair, even higher than that of DLC-Ag pair. In contrast, DLC-Ag pair displayed higher vacuum wear resistance than DLC-DLC pair, while they were applied to the harmonic drive with rough (R a >0.8 μm) contact face.
出处
《哈尔滨工业大学学报》
EI
CAS
CSCD
北大核心
2001年第4期481-484,共4页
Journal of Harbin Institute of Technology
基金
高等学校博士学科点专项科研基金资助项目(970 2 1 31 2 )
