摘要
利用双探针测试了微波 ECR等离子体参数 ,发现获得大面积均匀等离子体源强烈依赖于轴向磁场梯度 ,等离子体参数受气压影响亦很大 .
Measuring microwave ECR (electron cyclotron resnance) plasma parameters with a double-probe, the author discovered that a large-section uniform plasma soure is deeply dependent on the axial direction magnetic field gradient, the plasma parameters are also influenced by the gas pressure. The measurement results are in accord with theoritical analysing ones.
出处
《哈尔滨师范大学自然科学学报》
CAS
2001年第1期27-29,共3页
Natural Science Journal of Harbin Normal University
关键词
电子回旋共振
等离子体参数
磁场位形
测量分析
Electron cyclotron resonance
Plasma parameter
Magnetic field arrangements
