摘要
用微波等离子体化学气相沉积方法,在硅和石英玻璃基片上合成出了金刚石。
In this paper, the synthesis of diamond on silicon or silica glass substrate by means of microwave (2450 MHz) plasma chemical vapor deposition in a stream of hydrogen methane mixture was studied, the experimental conditions for formation of diamond in microwave glow discharge were examined and evaluated.
出处
《吉林大学自然科学学报》
CAS
CSCD
1991年第4期109-110,共2页
Acta Scientiarum Naturalium Universitatis Jilinensis
基金
国家自然科学基金
