摘要
本文简要介绍准分子激光溅射法制备高温超导薄膜的实验技术。重点阐述了近年来由大量实验研究所揭示出的激光溅射及成膜过程的一些基本特点和规律。同时,对准分子激光制膜保成份蒸镀这一独特优点的机制进行了深入的讨论。
In this paper, the laser sputtering method for preparing high TC superconducting films introduced. Some basic law and characteristics of laser sputtering and film growth process, revealed by a lot of experiment studies are described in detail. The mechanisms for preservation of the correct stoichiometry in the film is also discussed.
出处
《激光与红外》
CAS
CSCD
北大核心
1991年第4期8-12,共5页
Laser & Infrared
关键词
超导薄膜
高温
溅射法
准分子激光
laser sputtering, high temperature superconducting film
