摘要
利用傅里叶变换红外光谱仪和X射线激发的CKLL俄歇谱的一次微分表征了类金刚石(DLC)膜的微结构。指出在高离子能量轰击和低CH_4压强下所形成的DLC膜内以sp^3C-C键为主,并且sp^3碳成分随V/Pa^(1/2) 增加而增加,与退火温度从200℃ 到800℃无关,DLC膜具有好的热稳定性。DLC膜密度研究指出:膜密度与沉积参量和基底材料有关。
Microstructure of diamondlike carbon(DLC)films were characterized using Fourier transformIR spectroscopy and CKLL first-derivative X-ray excited Auger electron spectra.Theseexaminations show that sp^3 C-C bonds are dominate in DLC films formed under high ion bombardmentenergy and low CH_4 pressure, and sp^3 carbon component increases with V/Pa^(1/2),DLC films have good thermal stability whatever the annealing temperatures ranging from200-800℃. An investigation of the densities of DLC films showed that the densities of films are ralatedto deposition parameters and substrate material.
基金
江苏省科委资助
