摘要
介绍了光电高精度全场形位检测系统。该系统以面阵ＣＣＤ作为被测物体边缘图象的探测器件，应用激光衍射和图象处理技术进行被测物体边缘的精确定位，实现了高精度全场形位检测。该系统具有测量速度快、检测精度高及数据处理自动化等特点。整个系统是近代光学、光电技术与微机技术的有机结合。
The photo-electric measuring system for the field of shape and position with high precision is described in this paper. By using a plane scanning CCD and the techniques of laser diffraction and image processing, the measuring system can realize the measurement of the field of shape and position. It possesses the advantages of high precision and high efficiency, for it is a combination of modern optics, photoelectric technique and microcomputer.
出处
《计量学报》
CSCD
1994年第4期292-295,共4页
Acta Metrologica Sinica
