摘要
本文采用散斑干涉理论研究固体表面面内位移测量的激光多普勒效应方法。理论和实验表明测量结果中存在一项随机相让误差，尽管该误差可在一定程度上补偿，但不能消除，因而限制了测量精皮的提高。此外，本文还给出了测量过程中信号随机消失的原因以及延长信号不间断距离的方法。
The theory of speckle interferometry is applied to study the measurement of the in-plane displacement of solid surface by laser Doppler effect. Theoretical analyses and experiments prove that there is a random phase error in the measurement,which, although may be compensated to a certain extent, will impede further improvement of measurement accuracy. Besides, the reason of the random signal drop-out in the measurement is also studied, and the method of extending the range in which the signal maintains continuous is given as well.
出处
《计量学报》
CSCD
1994年第4期286-291,共6页
Acta Metrologica Sinica
基金
国家自然科学基金
关键词
面内位移
测量
激光多普勒效应
散斑干涉计量
随机相位误差
固体表面
In-plane displacement measurement
Laser Doppler effect
Speckle interferometry
Random phase error
Signal drop-out
