摘要
本文研究报导了ZQ高压功率二极管的玻璃钝化方法,采用适当的腐蚀技术、玻璃粉涂敷技术和玻璃微晶化技术,获得了良好的内层玻璃钝化膜。实验结果表明,用该膜钝化的ZQ器件具有优良的可靠性和高温工作特性。
In this paper, We report the glass passivation Method of ZQ high voltage power diode. The good inner glass passivating film by proper etch-technology, glass powder coating-technology and glass-microcrystalline technology was obtained. The experimental results show ZQ Devices have good reliability and high temperature oprational properties to make use of this passivating film.
出处
《河北大学学报（自然科学版）》
CAS
1991年第3期41-47,共7页
Journal of Hebei University(Natural Science Edition)
关键词
功率二极管
玻璃
膜
微晶
钝化膜
high voltage power diode,glass passivation,microcrgstallinc glass,electrophoretic coating method,melting-condensing glass.
