摘要
纳米级计量技术是解决目前和未来许多高精度、高分辨力问题的先决条件之一。本文简要地介绍了国内外纳米技术的发展现状及未来的发展趋势,讨论了实现纳米级计量技术的几种方法。通过实例,说明了纳米技术对航天高科技发展的必要性。
Nanometer measurement technology is one of the preconditions to solve many current and future problems of high accuracy and resolution.This paper discusses some methods of realizing nanometer measurement technology and introduces briefly the developing status and future tendency of nanometer technology bo th at home and abroad.The widespread influence and necessity of to the development of space high-technology are also indicated by example.
出处
《导弹与航天运载技术》
1994年第6期54-67,共14页
Missiles and Space Vehicles
关键词
几何量测量
计量
纳米级计量
Dimensional measurement,Metering,Development trend.