摘要
介绍了多晶硅产业的发展和研究现状,并针对改良西门子法的多晶硅制备环节,总结和分析了工艺、装备及管理的能耗影响规律,并阐述了节能降耗的方法和措施。工艺方面应在保证三氯氢硅一次转化率的前提下,尽量提高多晶硅的沉积速率,通过适当提高混合气流量和硅棒温度,提高三氯氢硅摩尔比例,提高炉内反应压力,达到降低电耗的效果;装备方面可以选用多对棒还原炉,并优化配套电器系统来确保电耗进一步降低;管理降耗的重点是重视市场的资源配置作用,能够适时根据市场环境及时调整多晶硅质量策略,并尽量降低备件消耗,利用考核和绩效激励方式减少人为浪费。
The development and the current status of polysilicon industry are carefully described. Aiming at polysilicon preparation by Siemens method, the main influence of energy consumption was analyzed, including technology, equipment and management. It was also discussed the way of energy conservation. When maintaining TCS conversion efficiency as far as possible, increasing polysilicon deposition rate is the best way of saving energy. Increased deposition rate could be achieved by： raising the rod temperature, increasing the trichlorosilane（TCS） mole ratio, increasing the TCS mass flow over the rods, increasing the pressure in the reaction chamber. Improving the efficiency of energy conservation could be achieved by proper reactor design and operation. It was a trend to utilize more pair rods reactor, and the optimization of electric control system could ensure the power consumption further reduced. Improving management played a important role in energy conservation and material consumption. Polysilicon production and quality strategy should be timely arrangedt according to the market environment. It is important to reduce the consumption of raw material and consumables, and performance appraisal should be used to cut the human waste.
出处
《中国有色冶金》
CAS
2014年第3期24-27,共4页
China Nonferrous Metallurgy
关键词
多晶硅
沉积速率
节能降耗
polysilicon
deposition rate
energy conservation
