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Large-scale assembly of Cu/CuO nanowires for nano-electronic device fabrication 被引量:2

Large-scale assembly of Cu/CuO nanowires for nano-electronic device fabrication
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摘要 To improve the efficiency of nano-electronic device fabrication, a new method named floating electrical potential assembly is proposed to realize large-scale assembly of Cu/CuO nanowires, The simulation of floating electrical potential distribution on the micro-electrode chip is performed by COMSOL software, and the simulation result shows that the coupled electrical poten- tial on the floating drain electrodes is very close to the original electrical potential applied on the gate electrode, whicb means that the method can provide di-electrophoresis (DEP) force for all the electrode pairs at one time, thus realizing large-scale as- sembly at one time. With Cu/CuO nanowires well dispersed and micro-electrode chip fabrication, nanowires assembly experiments are performed and the experimental results show that Cu/CuO nanowires are assembled at hundreds of micro-electrodes pairs at one time, and the success rate of nanowires assembly also reaches 90%.
出处 《Science China(Technological Sciences)》 SCIE EI CAS 2014年第4期734-737,共4页 中国科学(技术科学英文版)
基金 supported by the National Natural Science Foundation of China(Grant No.51005230) China Postdoctoral Science Foundation(Grant No.2012M520654) the Education Department of Liaoning Province Science and Ttechnology Research Projects(Grant No.L2012213)
关键词 large-scale assembly Cu/CuO nanowires floating potential di-electrophoresis 纳米电子器件 大型组件 氧化铜 芯片制造 纳米线 浮动电位 电势分布 实验分析
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