摘要
微小型化是红外焦平面探测器发展的必然趋势,微小型化将使目前焦平面阵列存在的占空比小、光能利用率低的问题体现的更加明显,针对这一状况,提出一种利用分子间引力的光胶技术将矩形孔径球面微透镜阵列集成于红外焦平面之中。采用几何光学理论分析了微透镜阵列的聚能效应,设计并制作"栅线"和"方孔"双对准标记,采用衍射光栅同轴对准方法使两种器件的对准精度达到0.1μm。对集成前后红外焦平面阵列性能进行测试,发现响应率提高了近40%,探测率提高了约20%,红外焦平面的噪声从758.89μV下降到668.23μV。最终得到结论:光胶法用于两种器件的集成具有耐温性好、变形小、强度高等优点,集成后红外焦平面的探测性能显著提高,有利于探测器微小型化发展。
According to the problem of small duty cycle and low light energy utilization in infrared focal plane, an optical cement technology is putted forward that integrated square aperture spherical micro-lens arrays and infrared focal plane. Micro-lens arrays cumulative effect is analysed theoretically in this paper.“grating line”and“cross”double alignment marks are designed. Alignment micro-lens arrays and infrared focal plane by diffraction grating coaxial alignment method, We find that responsivity improved 40%, detectivity improved 20%. Noise decreased from 758.89μV to 668.23μV by comparison of pre integration. And show that There are many advantages of temperature resistance, small deformation etc, detection performance improved significantly, helpful to the develop of detector Microminiaturization.
出处
《红外技术》
CSCD
北大核心
2014年第3期225-228,共4页
Infrared Technology
基金
吉林省自然科学基金资助项目
编号:201215142
关键词
红外焦平面
微透镜阵列
光胶集成
infrared focal plane
micro-lens arrays
optical cement integration
