摘要
本文介绍了一种新的接近——接触式光刻系统,刻制出多块带零位的、129600对铬线圆光栅。该光栅刻线质量良好,采用直流比相法检测,最大直径间隔误差为0.35～0.55″,均匀性误差为0.20～0.35″。
A new-type proximity/contact photolithographic system was developed, by which a circular grating with zero position grating and 129600 pairs of lines was produced and used in the Model JC-1 Precision Goniometer. These grating lines are good in quality.The maximum diameter interval error as well as the homogeneity error were measured to be at the range of 0.35' to 0.5' and 0.20' to 0.35' by means of the DC phase comparison method, respectively.
出处
《光学仪器》
1991年第3期1-5,共5页
Optical Instruments
