摘要
本文较系统介绍了一门新近发展起来的学科——光散射及其测量技术。文中给出了光散射的物理和数学模型;分析了散射与物体表面轮廓形貌的统计特性之间的关系;介绍了几种典型的积分散射和散射分布函数测量方案以及应用实例。
A newly developed science subject-the light scattering and its measurement is introduced systematically. A physical modal and its algorithm are discussed. The relationship between scattering and statistical features of surface topography is analysed. Some typical arrangements of TIS and BSDF measurements, and the prospects of this technique are sampled.
出处
《光学技术》
CAS
CSCD
1991年第5期5-12,共8页
Optical Technique
关键词
光散射
测量
光学
表面粗糙度
Scattering Scattering Distribution function Surface roughness Topography.