摘要
研制了离化团束淀积装置。目前的实验结果,使用离化团束淀积技术在玻璃冷基底上镀制的ZnS膜MgF_2膜的机械牢固性较电子束在同样条件下制备的ZnS膜和MgF_2膜较强。用反应性离化团束技术制备的ZnO膜具有优良的取向结构。通过控制参数可以控制ZnO膜的结晶结构。
The ionized-cluster beam (ICB) deposition apparatus has been developed and some optical coatings deposited by ICB are investigated. The scratch test shows that the ZnS film and MgF_2 film diposited at the cold substrates by ICB are nearly thousand times and hundreds times, respectively, as hard as that diposited by electronics at the same conditions, and possess excellent orientation characteristics.
出处
《光学机械》
CSCD
1991年第4期19-26,共8页
