摘要
作为光束均值器,λ/4波片是大功率CO_2激光加工机中的关键部件。多层膜反射镜(包括内反射和外反射),在倾斜入射时,两个偏振分量会产生不同的相移,因此可用计算机优化设计出特定位相差的膜系。本文的目的是设计10.6μm的90°相位膜,它的作用就象四分之一波片。与传统的波片相比,它的优点是可以适用于任何波长,具有高的位相精度和大的孔径。文中提出了两种设计方法,并报告了制备技术、实验结果及误差分析。
Quarterwave plate as a light beam average component,is a key component in high power CO_2 laser processing mechine.At oblique incidence the multilayer reflectors,including internal and external reflections,have different phase shifts for the two planes of polarlz- ation.Therefore the design of reflators with specific phase shift have been carried out by computer optimization.The purpose of this paper is to design coating with the relative difference of phase shifts of 90° at 10.6μm.The reflectors with the phase difference of 90°will act as a quarterwave plate.Some advantages over bulk quarterwave plates are that they may be used for any wavelength,may have higher pr- ecision of phase shift difference and large apertures.The two design methods,experimental techniques,results and errors analysis are pr- esented.
出处
《光学机械》
CSCD
1991年第2期47-51,共5页
