摘要
本文从膜系设计、材料选择、制备工艺及测量,较全面地论述了10.6μm高能激光高反膜的研制过程。研制成一种性能良好的三元混合氟化物(BaF_2,SrF_2,CeF_3)低折射率材料,并对由此材料蒸镀的膜层进行了晶体结构分析。已研制出反射率分别达99.0％、99.3％和99.5％的保护银膜、增强银膜和高增强银膜等三种高能激光高反膜,反射率是用自行研制的测量装置测定的。
This paper systematically describes the development of 10.6μm high power laser mirror, consisting of designing metal-dielectric coatings, selecting materials, the technique of preparation and mea- surement. A poly-fluoride(BaF_2, SrF_2, CeF_3)low-index coating ma- terial of fine performance has been studied, and the crytal structure of the thin films prepared by using the new coating material has been analyzed. Three kinds of high power laser mirrors have been prepared, including protected silver coating R=99.0%; enhanced sil- ver coating R=99.3%; super enhanced silver coating R=99.5%. The refectivity is measured with the instrument designed by ourself.
出处
《光学机械》
CSCD
1991年第2期42-46,共5页
