摘要
为了提高激光三角测量系统的精度,减小待测表面倾斜对测量结果的影响,针对具有某种具体表面特性的待测表面,提出了一种表面倾斜校正算法。该算法采用对不同的倾斜角度所产生的偏差与倾斜角度建立一个函数库,对该函数库进行曲线拟合,产生一条标准倾斜角度误差曲线,根据该曲线及待测表面的倾斜角度对测量结果进行校正。实验结果表明:该算法可以将待测表面倾斜引起的测量误差减小到原来的1/5,最终可以将此测量误差控制在±10μm以内,对不规则表面的测量具有较好的实用价值。
In order to improve the accuracy of the laser triangulation system,reduce the effect of the inclined surface to be measured on measurement results,a correction algorithm of surface tilt is proposed for the surface to be measured,which possesses some specific surface characteristics.A library function between different angles and their deviation is established,and it is then fitted by a curve,so that a standard angle error curve is obtained.According to the curve and tilt angle of the surface to be measured,the measurement result is thus corrected.The experimental results show that using the algorithm can reduce the impact of the measurement results of the tilted surface to one-fifth of the original,and the ultimate measurement deviation brought by the tilt of measured surface can be controlled within plus or minus 10 μm.The algorithm displays high practical value for the measurement of irregular surfaces.
出处
《光学仪器》
2014年第1期11-14,19,共5页
Optical Instruments
关键词
测量与计量
激光三角法
校正算法
漫反射
表面倾斜
measurement and metrology
laser triangulation
correction algorithm
diffuse reflection
surface tilt
