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超精密机床溜板的模糊-PID振动主动控制研究 被引量:2

The Study on Fuzzy-PID Active Vibration Control of Slide in Ultra-precision Machine
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摘要 振动是影响超精密加工质量的关键因素之一,而溜板的横向振动将通过刀架直接影响被加工工件的表面质量。为此,本文提出了溜板的振动主动控制。作动器采用自行研制的主动空气轴承作动器,以实现无摩擦接触,从而实现溜板纵向运动中的横向振动控制。控制采用模糊-PID控制,误差大时,采用模糊控制;误差小时,采用PID控制。实验结果表明,基于主动空气轴承的模糊-PID控制可以有效地减小溜板振动。 Vibration is one of the key factors influencing the machin ing quality, and especially the influence of slide transverse vibratio n is more notable due to direct effect on workpiece through tool rest, therefor, the active vibration control of slide is proposed in this p aper. The active air bearing developed by ourselves is used as actuato r for friction-free contact to implement the transverse vibration cont rol while slide moves along longitudinal direction. The controlling me thod is fuzzy-PID control which operation is that fuzzy control is ado pted while the error is bigger and PID controlled adopted while the er ror is smaller. The experimental results show that the fuzzy-PID contr ol can minimize the vibration of slide effectively.
出处 《燕山大学学报》 CAS 2001年第1期57-60,共4页 Journal of Yanshan University
关键词 超精密机床 溜板 振动主动控制 主动空气轴承 模糊-PID控制 ultra-precision machine slide active vibration control active air bearing fuzzy-PID control.
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共引文献22

同被引文献20

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