摘要
提出了一种基于隧道效应的微机械角速率传感器的设计方案 ,还针对隧穿检测和电容检测进行了比较。
In this paper,a tunnelingbased micromachined angular rate sensor is put forward and designed.A brief comparison between tunnelingbased and capacitive sensors has been made.The paper presents that tunnelingbased microsensors can potentially provide a higher sensitivity using a simpler readout electronics for smaller device area than capacitive ones.
出处
《中国惯性技术学报》
EI
CSCD
2000年第4期75-79,共5页
Journal of Chinese Inertial Technology
