摘要
本文描述了高分辨率辉光放电质谱(GDMS)的固体元素分析,综述了GDMS的原理,定量方法,分析性能和仪器结构及其在高纯金属和半导体材料中的应用。还讨论了此技术用于痕量分析方面的优点。
A high resolutlon GDMS for the elemental analysis of solids is described. The principle, quantitation method, performance, and the instrument constructure of GDMS and it's application in the high purity metals and semiconductor materials are reviewed. The advantages of GDMS technique in the trace analysis are discussed as well.
出处
《功能材料》
EI
CAS
CSCD
1991年第2期108-118,共11页
Journal of Functional Materials
