摘要
本文通过 Sol- gel法在 Al2 O3基片上制得了 Ti O2 纳米薄膜 ,经 XRD分析 ,薄膜具有多晶结构 ,其主晶相为金红石 .本实验还对 Ti O2 薄膜的氧敏特性进行了研究 ,实验结果表明 ,Ti O2 纳米薄膜在 80 0℃下具有良好的氧敏特性和重复性 。
This paper describes the preparation of TiO 2 film on Al 2O 3 substrates by the Sol-gel method.The results of XRD analysis show that the TiO 2 film has a poly-crystal structure and its primary crystal is rutile.In this paper the oxygen-sensing character of TiO 2 film is also studied.The results of experiments indicate that the TiO 2 film has a good oxygen-sensing character and reproducibility at work temperature of 800 ℃ and excellent response time.
出处
《天津大学学报（自然科学与工程技术版）》
EI
CAS
CSCD
2000年第6期802-805,共4页
Journal of Tianjin University：Science and Technology
基金
国家基金重大项目! 5999552 0 - 6
863计划新材料领域! 71 5- 0 1 2 - 0 1 50资
