摘要
本文研究了复合钒钼酸凝胶薄膜的湿敏特性。复合钒钼酸凝胶薄膜的湿敏性能较复合钒酸好 ,而且其电阻随相对湿度的增加而减小 ,添加正硅酸乙酯 (TEOS)对其湿滞有明显的改进作用 ,含 5 wt% TEOS的薄膜的湿滞回差最小。同时器件的响应恢复较快。
The humidity sensing properties of poly vanadium molybdenum acid xerogel thin films are described in this paper.The resistance of the thin films decreases with the increase of the relative humidity.The addition of ethyl silicate (TEOS) has a distinct improvement on the hysterics of the devices.The thin film containing 5wt% TEOS has the lowest hysterics.At the same time the response and the recovery are all quick.The XRD results show that the poly vanadium molybdenum acid xerogel thin films have layered structure.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2001年第1期45-48,共4页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金 !(No.697760 38)
国际合作项目资助项目
关键词
湿度传感器
复合钒酸凝胶
薄膜
正硅酸乙酯
Humidity sensors Poly vanadium molybdenum acid xerogel Thin films TEOS
