摘要
采用皮秒激光对石英玻璃进行打孔实验，探究了石英玻璃在532nm皮秒激光作用下的损伤阈值，同时通过控制变量法研究了激光能量密度、脉冲持续时间和激光重复频率等参数对石英玻璃加工孔径与深度的影响，并对这种规律进行简要的分析。通过实验最终得出皮秒量级下石英玻璃的损伤阈值约为2．01J／cm2，并发现所加工石英玻璃的孔径与深度在一定范围内与激光能量密度和加工时间成正比，但增速最终趋于平缓；激光重复频率对小孔加工质量亦有重要影响。最后，在得到的损伤阈值和加工规律基础上对加工参数进行了初步优化，获得了无裂纹、表面形貌规整的小孔加工效果。
In this paper, picosecond laser drilling of quartz glass is studied. The 532 nm picosecond laser induced ablation threshold of quartz glass is explored and the basic parameters of the picosecond laser processing of glass, including the laser power, repetition rate and processing time, are investigated. From the study, the ablation threshold of quartz glass at picosecond pulse width is concluded to be around 2.01 J/cm2 . It is found that the diameter and depth of the holes drilled in quartz glass are proportional to the laser fluence and processing time, but the rate of increase levels off finally. Meanwhile the laser repetition rate also has an important influence on the machining quality. Picosecond laser crack-free processing of quartz glass is achieved by optimizing the laser parameters based on the ablation threshold and the processing rules obtained in our research.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2013年第B12期90-95,共6页
Chinese Journal of Lasers
基金
国家自然科学基金（51275011）、新世纪优秀人才支持计划（NCET10-0007）、北京市自然科学基金重点项目（3111002）、北京市教育委员会科技计划重点项目和北京市人才强教拔尖创新项目（05313999200601）
