摘要
光刻版清洗机是典型的多轴运行类自动化清洗设备,清洗效率的提升是此设备的关键技术之一。介绍了一种基于时序分析的提升该设备运行效率的方法,实验证明此方法通过对控制时序的分析和优化,有效提升了设备的运行效率。
The photomask cleaning system is typical automatic cleaning equipment with multi axis running, and stepping up the run efficiency is one of the pivotal techniques of the equipment. This paper introduces a method for stepping up the run efficiency of the equipment based on timing analysis, and the experiment proves that the method steps up the run efficiency of the equipment effectively through analyzing and optimizing the control timing.
出处
《电子工业专用设备》
2013年第12期36-38,共3页
Equipment for Electronic Products Manufacturing
关键词
光刻版清洗机
时序分析
运行效率
The photomask cleaning system
Timing analysis
Run efficiency
