摘要
1-3复合材料作为敏感元件已经被广为研究,但作为一种激励元件的研究极为有限。利用有限元原理研究一种1-3型压电复合材料。这种材料中,PZT-5H压电陶瓷作为单元支梁,聚合物作为这种压电陶瓷周围的填充基体。通过改变PZT-5H在这种材料中的体积比率,再经过谐响应分析,可以得到一种具有最高的机电耦合特性的结构。为了简化有限元建模的复杂程度和缩短计算时间,将这种1-3型复合材料等价为单一相的材料,并加以验证。这种新型的1-3型压电复合材料作为前沿技术可以用在半导体封装领域键合机的换能器上。
The use of 1-3 composite as sensing element has been widely reported. However,reports on the use of the materials as an actuator are very limited. In this study,1-3 mode piezocomposite material was investigated by finite element method（FEM）. To compose the 1-3 mode piezocomposites,PZT-5H for piezoceramic pillars and polymer were used to as a matrix. Volume fraction of PZT-5H was controlled modifying the size of pillars and their spacing. Though harmonic analysis（ANSYS software）,the highest electromechanical coupling coefficient can be achieved. In order to simplify the FEM model,the optimized 1-3 mode piezocimposite was simulated with a single phase material of equivalent properties and validated. The equivalent models have a good agreement with the 1-3 mode piezocomposite models. The 1-3 mode piezocomposite material further developed can be applied to install in a commercial wire bonding transducer.
出处
《电子工业专用设备》
2013年第12期6-9,20,共5页
Equipment for Electronic Products Manufacturing
关键词
聚合物
1-3型压电复合
有限元
换能器
Polymer
1-3 mode Piezocomposite
Finite element method
Transducer
