摘要
基于微波移频方法的硅材料少子寿命测量系统,使用采样电路与脉冲计数器结合的方式测量反射微波衰减信号,避免了用示波器观测衰减曲线时易受背景噪声的影响,并使测量装置的结构更加紧凑与轻便。分析了各个状态下反射微波的波形,设计了对反射微波进行信号采样比较及时钟计时的电路。实验结果表明:实验结果与示波器观测衰减曲线的结果吻合,改进方法具有可行性。
Based on the silicon minority carrier lifetime measurement system applying microwave frequency shift （FS） method, combining sampling ：：ircuit with pulse counter to detect the reflect microwave attenuation signals can avoid the affect of background noise in detecting the decay curve by using the oscilloscope, and can make the detecting instrument more compact and portable. The reflect waveforms under different states are a：~aalyzed and the circuits for signal sampling and timing are designed for the reflect microwave. It is showed that the experimental results coincide with the observing decay curve obtained by oscilloscope, proving the feasibility of this new design.
出处
《半导体光电》
CAS
CSCD
北大核心
2013年第5期895-898,共4页
Semiconductor Optoelectronics
基金
中央高校基本科研业务费专项项目(暨)(11609506)
