摘要
自动阻抗调配器在微电子行业应用越来越广泛,但是目前国内还没有计量技术机构开展该类仪器的计量校准工作,本文介绍了其机械结构、工作原理,设计了控制模型,组建了校准系统,实现了主要参数矢量重复性、驻波比和插入损耗的校准工作。
Automatic tuner is widely used more and more in the microelectronics industry, But there are no such measurement institutions to carry out the calibration work of tuner. This paper describes the mechanical structure, working principle and design of the control model, set up a calibration system to a- chieve calibration work of the main parameter vector repeatability, VSWR and insertion loss.
出处
《宇航计测技术》
CSCD
2013年第5期19-22,共4页
Journal of Astronautic Metrology and Measurement
