摘要
根据垂直扫描白光干涉仪的结构参数,设计了其系统中微位移定位机构的柔性铰链,并应用Ansys对其性能进行有限元分析。分析结果显示,该柔性铰链的性能能够满足垂直扫描白光干涉仪的工作要求。
A flexure hinge of micro displacement mechanism in the vertical scanning whitelight interfer ometer（WLI） system was designed according to the structural parameters of the WL1, and the finite element a nalysis of its performance was carried out with the application of Ansys. The analysis results show that the per formance of the flexure hinge can meet the requirements of the WLI.
出处
《黎明职业大学学报》
2013年第3期71-73,共3页
Journal of LiMing Vocational University
基金
国家自然科学基金项目(51075160)
关键词
垂直扫描
白光干涉仪
柔性铰链
有限元分析
vertical scanning
white-light interferometer
flexure hinge
finite element analysis
