摘要
四探针技术是测量半导体电阻率的专用测量手段。介绍四探针探头的测试原理,在测试中影响四探针头性能的几个问题:弹簧片的结构存在不足,锥头与铜套配对容易错位,测试架连接件结构对测量的不良影响,以及检测探头参数的方法繁琐等,提出应对的改进方法。
Four-point probe technique is a special method of measuring semiconductor resistivity.Introduces the testing principle of four-point probe, and several problems to affect the performance of four-point probe during testing： Structure of spring sheet, cone head and the copper sleeve pairing easily dislocation, adverse effects of test stand connector structure and redundant means of testing the probe parameter, etc. The improving method is put forward to deal with them.
出处
《河南科技》
2013年第11期68-68,79,共2页
Henan Science and Technology
关键词
四探针头
弹簧片
模具
连接件
检测
Four-point probe
spring piece
mold
connector
test
