摘要
我们已开发出用于三片式彩色投影机的高集成化硅上液晶(liquidcrystal_on_silicon)光阀。硅片是由0.35μm、3 -金属和双压CMOS工艺设计和制作的 ,其空间分辨率为1280×1024象素。象素间距为12μm ,开口率为90 % ,显示区对角线为0.7in。硅片上安装着混合扭曲向列型和双折射液晶盒。Vrms=5.5V时的典型对比度为200∶1。光学分系统利用装有三个硅光阀的三色棱镜来实现彩色的分离和复合。已演示过一种紧凑的高对比度的SXGA视频投影机。
We have developed a highly integrated liquid crystal_on_silicon light va_ lve for three_panel color projector. The silicon panel was designed and fabricated by a 0.35μm, 3_metal and dual_voltage CMOS process with a spatial resolution of 1280×1024 pixels. The pixel pitch was 12μm, the fill factor was 90% and the display area was 0.77in in diagonal. The silicon panel was assembled with a mixed twisted nematic and birefringence liquid crystal cell. Contrast ratio was typically 200∶1 at 5.5Vrms. The optical sub_system utilized a trichroic prism assembly incorporating three silicon light valves for both color separation and recombination. A compact and high_contrast SXGA video projector was demonstrated.
出处
《现代显示》
2000年第4期24-32,共9页
Advanced Display
