摘要
由于弱调制光栅可以等效为平面波导,本文从平面波导的本征方程出发,导出垂直入射时弱调制光栅共振位置的表达式。分别以单层、双层膜系导模共振光栅结构为例,研究了光栅层厚度、周期、占空比对共振波长的影响。结合光学薄膜理论设计出一种窄带导模共振负滤光片。由于导模共振对入射波参数和光栅参数都极为敏感,具有窄带效应,用来制作窄带负滤波片非常可行。
The expression of the resonance wavelength of the weakly modulated grating with vertical incidence was derived from the Eigen equations of slab guide,because the weakly modulated grating can be equivalent to a slab guide.As exemplified with the single-layered and double-layered,guide-mode resonance gratings,the impacts of the grating parameters,such as the thickness,period,and filling factor of the grating,on the resonance wavelength were evaluated.Based on the calculated results and theoretical analysis,a novel type of narrowband,guided-mode resonance,minus filter was designed.Since the parameters of the grating and incident wave significantly affect the guided-mode resonance,these parameters can be used to design the narrowband minus filter.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2013年第8期844-847,共4页
Chinese Journal of Vacuum Science and Technology
基金
共性技术基金项目(9140A1806021201)
关键词
弱调制光栅
平面波导
导模共振滤光片
光学薄膜
Weak modulated grating
Slab guide
Guided-moded resonance filter
Optical thin film