摘要
为了准确获得压电泵泵腔容积的变化量,需要对压电振子的变形特性进行理论分析.将压电双晶片的受力模型分成2部分,即中间压电陶瓷和金属基板的3层复合部分,以及外部的金属基板部分.应用弹性薄板的小挠度弯曲变形理论,推导出固定边界条件下双晶片振动时的容积变化方程.结果表明:压电双晶片振动时容积变化的大小,是与双晶片的几何参数、材料的性能参数以及驱动电压有关的量.为了验证理论推导的正确性,对铜基板直径为35 mm、压电陶瓷直径为29 mm的压电双晶片,在不同直流电压驱动下中心点振幅进行非接触式激光测试,并将测试结果与理论计算值进行比较,结果表明:理论计算值要略大于实际测试值,两者之间存在20%左右的误差,但存在着一致性.应用泵腔容积变化量的理论计算方法,计算得到利用该压电振子制作的单腔压电泵在110 V,200 Hz正弦电压信号的作用下,泵腔每次振动产生的容积变化量约为128.81 mm3,理论上最大输出流量为3 091 mL/min.
The deformation characteristic of a circular piezoelectric vibrator in a piezoelectric pump needs to be analyzed theoretically in order to get precise change in volume of the chamber when the pump is in operation. The whole vibrator structure was divided into two substructures, namely the three-layer composite structure in the middle, which is composed of piezoelectric ceramic, metal sub- strates, and the external metal substrate structure. The volume change equation of the circular piezoe- lectric bimorph was derived under the fixed boundary condition based on the small deflection bending theory for the elastic thin plates. The analytical results indicated that the volume change of the bimorph is related to its geometry parameters, material property constants and the driving voltage. The displace- ments at the centre of the piezoelectric vibrator with 35 mm diameter copper substrate and 29 mm dia- meter bimorph were measured by using a non-contact laser measurement system when the vibrator was driven by different DC voltages, then they were compared with the above theoretical results to verify the equation proposed. It was confirmed that the analytical solutions are consistent with the measurements with an around 20% error. According to the equation above, if the single chamber of a piezoelectric pump is made of that piezoelectric vibrator measured, the predicted volume change of the pump will benearly 128.81 mm3 and with 3 091 mL/min maximum output flow rate when the vibrator is driven by a sinusoidal voltage signal （110 V, 200 Hz）.
出处
《排灌机械工程学报》
EI
北大核心
2013年第1期31-35,共5页
Journal of Drainage and Irrigation Machinery Engineering
基金
国家自然科学基金资助项目(51175213)
吉林市科技发展计划项目(201112208)
关键词
圆形压电双晶片
弯曲变形
容积
压电泵
输出流量
circular bimorph
flexural deformation
volume change
piezoelectric pump
output flowrate
