摘要
利用等离子体增强化学气相沉积技术(PECVD)在单晶硅(100)表面上制备了一层含有六方金刚石结构的碳氢薄膜。采用透射电子显微镜和拉曼光谱仪对薄膜结构进行表征;并用Nano-indenterⅡ型纳米压痕仪和CSM—摩擦磨损试验机对薄膜的力学性能和摩擦学性能进行了测试。结果表明:该碳氢薄膜含有六方金刚石结构,另外还含有少量的纳米弯曲石墨片段;与制备的类金刚石碳氢薄膜相比,该薄膜具有较好的力学性能,同时该薄膜在空气环境下表现出了较好的摩擦学性能。
The hydrogenated carbon film with hexagonal diamond structure was deposited on n-type Si （100） substrate by plasma enhanced chemical vapor deposition （PECVD）. The microstructure of the film was investigated by high-resolution transmission electron microscopy （HRTEM） and Raman spectrum. The mechanical properties and tribological behaviors were tested by nano-indenter and CSM-tribometer. The experimental results show that the film has a hexagonal diamond structure, also contains a small amount of nano-graphite fragments; compared with the diamondlike carbon film, this film shows better mechanical properties and more excellent tribological properties in air.
出处
《中国表面工程》
EI
CAS
CSCD
北大核心
2013年第4期55-59,共5页
China Surface Engineering
基金
国家自然科学基金(51275508)
国家重点基础研究发展计划(973计划)(2013CB632300)
关键词
等离子增强化学气相沉积
碳氢薄膜
六方金刚石
摩擦性能
plasma enhanced chemical vapor deposition （PECVD） carbon film hexagonal diamond tribology
