摘要
介绍了电容式硅微传声器的构造和工作原理,采用电-力-声类比法,建立了通用电容式硅微传声器的集总参数等效电路模型,并运用PSPICE软件对其动态特性进行计算机仿真,得到了仿真模型在1 kHz处的灵敏度达到-40 dB,并且在可听域范围内,频率响应平坦。
Structure and working principal of a capacitive silicon microphone are proposed. A lumped-parameter equivalent circuit model for general capacitive silicon microphone is built up by the analogy of electricity-mechanics-acoustics, and its dynamic characteristics are simulated by using PSPICE which is an emulation software of circuit, the result gets the sensitivity of - 40 dB at 1 kHz, and under the threshold of hearing frequency gets a flat frequency response.
出处
《电声技术》
2013年第7期18-21,共4页
Audio Engineering
关键词
电容式硅微硅传声器
电-力-声类比
仿真
capacitive silicon microphone
analogy of electricity-mechanics-acoustics
simulation
