摘要
真空电弧阴极现象是真空电弧涂镀(VAC)技术发辰的基础。本文试就真空电弧阴极斑点的分裂、阴极斑点的运动、阴极灼坑与侵蚀、阴极斑点的电流密度、阴极发射离子和离子能量、阴极发射宏观粒子等基础现象进行论述,在此论述的基础上简要评论VAC技术具有的优势、问题和进展。
Cathode phenomena of vacuum arcs are the basis of vacuum arc coating (VAC) technique. This paper tries to expound splitting and motion of cathode spots; craters and erosions on cathode surface; current density in cathode spot; ion energy in plasma; and macroparticles emitting from cathode spots. Based on the discussions, this paper gives out the advantages, problems and future developments of the VAC technique.
出处
《电加工》
1991年第3期36-39,35,共5页
