摘要
利用电子束蒸发技术沉积制备了碳化硼微球涂层,将微球涂层依次经退火和稀硫酸腐蚀处理后得到碳化硼空心微球,并借助XRD和SEM对碳化硼微球涂层的表面氧化问题进行了研究.XRD结果显示当衬底温度在120℃附近时,碳化硼涂层部分被晶化;对退火前后和酸腐蚀后的微球涂层进行SEM分析,结果表明,退火前的涂层表面部分被氧化成B2O3,退火后B2O3覆盖在涂层表面,酸腐蚀可以去掉B2O3,得到表面光洁的碳化硼空心微球.
Boron carbide coatings were deposited on steel mandrels using electron beam evaporation at room temperature -120 ℃. Deposited coatings were annealed at 900℃ in high purity nitrogen for 1 h. The boron carbide micro-shells were obtained after drilling and corrosion by dilute sulfuric acid. The composition of the coating was analyzed by X-ray diffraction （XRD）. The microstructure of the microshells were characterized by SEM. XRD pattern confirms that the as-deposited coating is composed of part crystallization boron carbide. SEM results show that the as-deposited coating was partially oxidated B2O3. After annealed, the coating surface was covered by the B2O3. Then, the smooth and clean boron carbide micro-shells surface was obtained after corrosion by sulfuric acid.
出处
《四川大学学报（自然科学版）》
CAS
CSCD
北大核心
2013年第3期601-604,共4页
Journal of Sichuan University(Natural Science Edition)
基金
国家重大科技专项子课题
关键词
ICF靶
碳化硼涂层
电子束蒸发
氧化
显微结构
ICF target, boron carbide coating, electron beam evaporation, oxidation, microstructure
