摘要
随着社会的工业化进程加快,机动车、电厂废气等人为因素产生的NO2日益增多。NO2虽然对臭氧的形成有重要作用,同时也会导致酸雨的形成,所以检测NO2的浓度在很多领域有着重要意义。本文以NO2为检测对象,对其不同频率响应采用两种传感器进行初步实验并进行比较分析,声表面波传感器是利用沿着物体表面传播的弹性波来感测信号的,而磁弹性传感器是由外加磁场对磁弹性材料的作用来感测信号的,两种传感器的响应信号都是频率偏移,在实验中,传感器的频率响应采用网络分析仪测试。实验结果表明,磁弹性传感器相对于声表面传感器对NO2的吸附前后频率响应更明显,对相关领域的研究更具实际意义。
With the speed up of industrialization process, NOz generated by vehicles, power plants emissions and other human factors is increasing. Since NOznot only plays important role in the formation of ozone, which also causes the formation of acid rain, the detection of NOzconeentration if of great significance among many areas. In this paper, to detent NOz, experiments and comparisons are done to the different frequency by two kinds of sensors. The sensing signal of SAW sensor if the elastic wave along the surface of the objects, while the sensing signal of the magnetoelas- tic sensor comes from the external magnetic field force on the magnetoelastic material, but response signals of both two sensors are frequency shift, which use the network analyzer to detect. The preliminary experiments results show that with the NOzadsorption, the frequency response of mag- netoelastie sensor is obvious than the SAW sensor, which owes more practical significance of research in related fields.
出处
《科技和产业》
2013年第5期123-125,共3页
Science Technology and Industry
关键词
声表面波
磁弹性
气体传感器
灵敏度
微电子
surface acoustic waves （SAW）
magnetoelastic
gas sensor
sensitivity
microelectronics
