摘要
在高真空的条件下,气体以分子流的形式存在而不再满足连续介质的条件。利用蒙特卡洛方法对真空系统中常用的高真空角阀在分子流时的传输概率和流导进行了计算。将蒙特卡罗方法计算结果和理论公式计算结果与样本的参考值进行对比,结果表明:蒙特卡洛方法的计算结果更接近高真空阀流导的样本值,为计算复杂结构高真空元件的流导提供了参考。
In the condition of high vacuum, gas exists in form of molecular flow regime and doesn＇t belong to continuous media any more. Therefore Monte Carlo method was introduced to calculate transmission probability and conductance of high vacuum fight-an- gle valves used in vacuum systems in molecular flow regime. Then the calculated results obtained by Monte Carlo method and theoreti- cal formula were compared with the given value of reference. It is proved that the result obtained by Monte Carlo method is more approximate with the given conductance value, which can provide references for the calculation of conductance of high vacuum compo- nents with complex structure.
出处
《机床与液压》
北大核心
2013年第9期35-38,共4页
Machine Tool & Hydraulics
关键词
分子流
高真空阀
蒙特卡罗方法
传输概率
流导
Molecule flow regime
High vacuum valve
Monte Carlo method
Transmission probability
Conductance
