摘要
介绍了一种新型的基于陶瓷基片加工工艺的π形梁15 000 m/s2厚膜压阻式加速度传感器.在加工过程中采用厚膜工艺与梁加工成型工艺,从而保证了梁结构的完整性.分析了该传感器的结构参数和灵敏度,同时介绍了其工艺流程及封装后的测试结果.基片尺寸为15 mm×6 mm×1 mm,其中敏感质量块尺寸为6 m×6 mm×1 mm,梁尺寸为3 mm×6 mm×0.3 mm.经初步测试,在采用12 V电源供电时灵敏度为0.002 4mVs2/m左右,响应频率为1.29 kHz.
A novel thick film piezoresistive accelerometer based on ceramic substrate technology was presented.The thick film and π-shaped spring leg（15 000 m/s2） working process were used to assure the integrity of the spring legs.The sensitivity and parameters of the accelerometer were analyzed,the process flow and the testing results were concluded.The ceramic substrate area was 15 mm×6 mm×1 mm,the π-shaped spring leg was 3 mm×6 mm×0.3 mm.The sensitivity of the accelerometer was about 0.002 4 mVs2/m under the condition of power supply 12 V with response frequency 1.29 kHz.
出处
《浙江师范大学学报（自然科学版）》
CAS
2013年第2期172-175,共4页
Journal of Zhejiang Normal University:Natural Sciences
关键词
陶瓷
厚膜
压阻
π形梁
加速度传感器
ceramic
thick film
piezoresistive
π-shaped spring legs
accelerometer
