摘要
紫外波段薄膜的研究在军事和民用领域都具有重要意义。国内外对该波段薄膜的研制多采用高、低折射率材料交替镀制的介质膜层结构,其缺点为对可见光截止度不好,易产生背景噪声。针对此问题从膜系设计理论出发,在对紫外薄膜材料特性、膜系优化设计技术、沉积技术、测试技术等方面进行研究的基础上采用紫外诱导透射滤光片的结构,并通过反复的理论计算与模拟实验,优化了材料的工艺参数,最终制备出在265nm处透过、300～1000nm波段截止的紫外滤光片。
Researches of ultraviolet band optical thin films are significant important in both military and civilian fields. Domestic and international researches about ultraviolet film often use high and low refractive index materials to alternately plat dielectric layer structures. The disadvantage is that the cutoff level in visible band is not good, so there will be large amount of background noise. Aim at this problem, this paper uses the coating design theory and adopts an induced transmission filter structure based on the thin film of ultraviolet material properties, coating optimization design technology, deposition and testing technology. Through repeated theoretical calculation and simulation experiments, process parameters of different materials are optimized. We deposit the ultraviolet induced filter which transmits at 265 nm and cutoffs at 30041000 nm.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2013年第5期174-177,共4页
Chinese Journal of Lasers
基金
国家自然科学基金(60977052)
预研项目紫外技术(51317020103)资助课题
关键词
薄膜
紫外诱导滤光片
紫外日盲
thin films
ultraviolet induced filter
ultraviolet solar blind
