摘要
提出了一种以压电叠堆作为驱动源的新型步进直线精密驱动器,设计了直线驱动器的整体结构,分析了直线驱动器的工作原理。制作了直线驱动器样机并进行试验测试,试验结果表明:步距与电压间具有良好的线性关系,但驱动器存在步距误差。采用PCI—6229NI数据采集卡,使用LabVIEW软件设计了驱动器闭环反馈控制系统,对比试验结果表明:驱动器定位精度显著提高,可达到0.06μm。
A novel stepping linear precise actuator is proposed based on piezoelectric stack as actuator element,the overall structure of linear actuator is designed,its working principle is analyzed.The prototype of linear actuator is fabricated,and its test is carried out.The experimental results show that there is a good linear relationship between voltage and step distance,but the actuator has step distance error.Using PCI—6229NI data acquisition card,closed-loop feedback control system of actuator is designed with LabVIEW software.The comparative experimental results show that the positioning precision of the actuator improves significantly,which reaches 0.06 μm.
出处
《传感器与微系统》
CSCD
北大核心
2013年第5期95-98,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(50605027)
关键词
驱动器
压电叠堆
步距
闭环反馈控制
actuator
piezoelectric stack
step distance
closed-loop feedback control
