摘要
讨论了深紫外曝光系统中椭球反射镜镀制装置在薄膜沉积中的镀制条件对膜厚和膜厚均匀性的影响 ,计算了椭球镜的膜厚均匀性并对如何改善椭球镜膜厚分布作了介绍 ,实验得到均匀性符合要求的反射镜。
The influence of coating conditions in ellipsoidal mirror coating chamber on coating thickness and coating thickness uniformity of deep ultraviol et exposure system is discussed.The coating thickness uniformity on ellipsoidal mirror is calculated and the method for improving the coating thickness distribu tion is introduced.The ellipsoidal mirrors which its coating thickness uniformit y conforms with the requirements are obtained in experiments.
出处
《光电工程》
CAS
CSCD
2000年第5期69-72,共4页
Opto-Electronic Engineering
