摘要
本文提出了一种运用泽尼克（Ｚｅｒｎｉｋｅ） 多项式的波前数据拟合方法－ 给出了离散点上正交多项式的构造并描述了具体计算步骤－ 可对待测物面低调制度点、散斑点、噪音及灰尘点区域进行波前数据拟合，通过一定阈值的设定，将误差点用掩模滤除并予以拟合－ 进一步提高了物体测量精度－
A method of wavefront data fitting using Zernike polynomials is presented.Generation of orthogonal polynomials on a discrete set of data points is given and procedures of computing wavefront coefficients are described.It is mainly used in the cases of low modulation,speckle,noise or dust points.Through the establishment of a certain threshold,a mask is set up on error points.The measurement accuracy is inproved further.
出处
《光子学报》
EI
CAS
CSCD
1999年第12期1113-1116,共4页
Acta Photonica Sinica
